JPH0355075Y2 - - Google Patents

Info

Publication number
JPH0355075Y2
JPH0355075Y2 JP1983015180U JP1518083U JPH0355075Y2 JP H0355075 Y2 JPH0355075 Y2 JP H0355075Y2 JP 1983015180 U JP1983015180 U JP 1983015180U JP 1518083 U JP1518083 U JP 1518083U JP H0355075 Y2 JPH0355075 Y2 JP H0355075Y2
Authority
JP
Japan
Prior art keywords
pedestal
silicon diaphragm
housing
metal member
thin metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983015180U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59122537U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1518083U priority Critical patent/JPS59122537U/ja
Publication of JPS59122537U publication Critical patent/JPS59122537U/ja
Application granted granted Critical
Publication of JPH0355075Y2 publication Critical patent/JPH0355075Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP1518083U 1983-02-04 1983-02-04 シリコンダイアフラム形圧力変換器 Granted JPS59122537U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1518083U JPS59122537U (ja) 1983-02-04 1983-02-04 シリコンダイアフラム形圧力変換器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1518083U JPS59122537U (ja) 1983-02-04 1983-02-04 シリコンダイアフラム形圧力変換器

Publications (2)

Publication Number Publication Date
JPS59122537U JPS59122537U (ja) 1984-08-17
JPH0355075Y2 true JPH0355075Y2 (en]) 1991-12-06

Family

ID=30146516

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1518083U Granted JPS59122537U (ja) 1983-02-04 1983-02-04 シリコンダイアフラム形圧力変換器

Country Status (1)

Country Link
JP (1) JPS59122537U (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53109483U (en]) * 1977-02-08 1978-09-01

Also Published As

Publication number Publication date
JPS59122537U (ja) 1984-08-17

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